나노스코프시스템즈

KOR

3D Measurement

NS-3600

For accurate optical 3D measurement

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제품사양

Model	Microsope	NS-3600				Remark
Objective lens magniﬁcation		10×	20×	50×	100×
Observation / Measuring range	Horizontal (H): μm	1400	700	280	140
Observation / Measuring range	Vertical (V): μm	1050	525	210	105
Working distance: mm		17.5	4.5	1.0	1.0
Numerical aperture (N.A.)		0.30	0.45	1.0	1.0
Optical system for observation/measurement		Pinhole confocal optical system
Height Measurement	Measuring scan range	10 mm
	Display resolution	0.001 µm
	Repeatability σ	0.02 µm				Note 1
Width measurement	Display resolution	0.001 µm
Width measurement	Repeatability 3σ	0.03 µm				Note 2
Frame memory	Pixel count	1024x1024, 1024×768, 1024×384, 1024×192, 1024×96
	For confocal image	12 bit
	For color image	8-bit for RGB each
	For height measurement	16 bit
Frame rate	Surface scan	20 Hz to 160 Hz
Frame rate	Line scan	~8 kHz
Laser beam light source for confocal measurement	Wavelength	Red laser, 638 nm
	Output	~2 mW
	Laser Class	Class 3b
Laser light-receiving element		PMT (photomultiplier tube)
Light source for optical observation	Lamp	LED
Color camera for Optical observation	Imaging element	Color CCD image sensor
Color camera for Optical observation	Recording resolution	1296x966
Data processing unit		Dedicated PC
Power supply	Power-supply voltage	100 to 240 VAC, 50/60 Hz
Power supply	Current consumption	500 VA max.
Weight	Microscope	Approx. ~50 kg (Measuring head unit : ~12.5 kg)
Weight	Controller	~8 kg
Vibration isolating system		Pneumatic isolator

Note 1 :
100 times measurement of standard sample (1µm step height) with 100× / 0.9 objective.
Note 2 :
100 times measurement of standard sample (5µm pitch) with 100× / 0.9 objective.

Dimensions