3D Measurement

NS-3600

For accurate optical 3D measurement

제품사양
Model Microsope NS-3600 Remark
Objective lens magnification 10× 20× 50× 100×
Observation /
Measuring range
Horizontal (H): μm 1400 700 280 140
Vertical (V): μm 1050 525 210 105
Working distance: mm 17.5 4.5 1.0 1.0
Numerical aperture (N.A.) 0.30 0.45 1.0 1.0
Optical system for observation/measurement Pinhole confocal optical system
Height Measurement Measuring scan range 10 mm
Display resolution 0.001 µm
Repeatability σ 0.02 µm Note 1
Width measurement Display resolution 0.001 µm
Repeatability 3σ 0.03 µm Note 2
Frame memory Pixel count 1024x1024, 1024×768, 1024×384, 1024×192, 1024×96
For confocal image 12 bit
For color image 8-bit for RGB each
For height measurement 16 bit
Frame rate Surface scan 20 Hz to 160 Hz
Line scan ~8 kHz
Laser beam light source for
confocal measurement
Wavelength Red laser, 638 nm
Output ~2 mW
Laser Class Class 3b
Laser light-receiving element PMT (photomultiplier tube)
Light source for optical observation Lamp LED
Color camera for Optical observation Imaging element Color CCD image sensor
Recording resolution 1296x966
Data processing unit Dedicated PC
Power supply Power-supply voltage 100 to 240 VAC, 50/60 Hz
Current consumption 500 VA max.
Weight Microscope Approx. ~50 kg (Measuring head unit : ~12.5 kg)
Controller ~8 kg
Vibration isolating system Pneumatic isolator
  • Note 1 :

    100 times measurement of standard sample (1µm step height) with 100× / 0.9 objective.

  • Note 2 :

    100 times measurement of standard sample (5µm pitch) with 100× / 0.9 objective.

Dimensions